JPH0455132U - - Google Patents
Info
- Publication number
- JPH0455132U JPH0455132U JP9778490U JP9778490U JPH0455132U JP H0455132 U JPH0455132 U JP H0455132U JP 9778490 U JP9778490 U JP 9778490U JP 9778490 U JP9778490 U JP 9778490U JP H0455132 U JPH0455132 U JP H0455132U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- vapor phase
- phase growth
- growth apparatus
- reaction tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9778490U JPH0455132U (en]) | 1990-09-18 | 1990-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9778490U JPH0455132U (en]) | 1990-09-18 | 1990-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0455132U true JPH0455132U (en]) | 1992-05-12 |
Family
ID=31838458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9778490U Pending JPH0455132U (en]) | 1990-09-18 | 1990-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0455132U (en]) |
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1990
- 1990-09-18 JP JP9778490U patent/JPH0455132U/ja active Pending